Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers, semiconductor devices, electronic integrated circuits or flat panel displays; machines & apparatus specified in note 11 (C) to this Chapter

Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor boules or wafers

Machines and apparatus of a kind used solely or principally for the manufacture of semiconductor devices or of electronic integrated circuits

Machines and apparatus of a kind used solely or principally for the manufacture of flat panel displays

Machines and apparatus of a kind used solely or principally for the manufacture or repair of masks and reticles, assembling semiconductor devices or electronic integrated circuits, or for lifting, handling, loading or unloading items of heading 8486

Machines and apparatus of heading 8486; parts and accessories